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Turbo Molecular Pump
Turbo Molecular Pump
Product details

Turbomolecular Pump - Leader in Vacuum Pumps

The application of vacuum technology has enabled a large number of high-tech products to enter people's daily lives. In fact, a large number of applications in research and industrial fields require extremely low absolute pressure, i.e. high vacuum environment. Named after the turbine series products, turbo molecular pumps represent the world's leading technological standards. A high-speed rotor with a speed of up to 90000 rpm can generate the pressure conditions required for applications, resulting in up to 10% in the high vacuum and ultra-high vacuum ranges-11The vacuum degree of mbar.

The perfect vacuum solution meets the highest requirements

Pufa Vacuum has a complete range of turbo molecular pump products with pumping speeds ranging from 10 to 2700 liters per second. The product has high cost-effectiveness and flexible installation methods. The bearing system that has been verified through practice provides more optimized reliability. There are usually two types of bearings to choose from - one is a composite bearing system composed of ceramic ball bearings on the front vacuum end and permanent magnet radial bearings on the high vacuum end, and the other is a fully active magnetic levitation bearing system, whose rotor is suspended in the air without any contact or wear. Thanks to the precise rotor design, the product has better pumping speed, better front-end pump compatibility, and larger air flow rate, resulting in a higher compression ratio for small molecule gases.

molecular pumpHipace®10-800 l/sTechnical Parameter

Molecular pump model

Molecular pump connection sizeDN

Pull speedl/s

Compression ratio

Maximum starting pressurehPa

limiting pressure

Full speed gas flow ratehPa l/s

Start Time

weight

Air intake

exhaust port

nitrogen
N2

heliumHe

Hydrogen gasH2

nitrogen
N2

nitrogenN2

nitrogenN2

min

kg

HiPace ® ten

25

16

10

6

3.7

3X106

25

< 5X10–5

0.37

0.9

1.8

HiPace ® 60 P

63

16

64

48

28

1X106

4

< 1X10–7

9.2

1.1

2.2

HiPace ® eighty

63

16

67

58

48

> 1X1011

22

< 1X10–7

1.3

1.75

2.4

HiPace ® three hundred
HiPace ® 300 C

HiPace ® 300 P

HiPace ® 300 Plus

100

16

260

255

220

> 1X1011

15(controllerTC 110)
20(Controller)TC 400

< 1X10–7

5(Controller)TC 110
14(Controller)TC 400

3.5(TC 110)
1.8(TC 400)

5.8 – 8.2

HiPace ® four hundred
HiPace ® 400 P

100

25

355

470

445

> 1X1011

11

< 1X10–7

6.5

2

11.6 – 17.5

HiPace ® seven hundred

HiPace ® 700P

HiPace ® 700 Plus

160

25

685

655

555

> 1X1011

11

< 1X10–7

6.5

2

11.5 – 17.4

HiPace ® eight hundred

HiPace ® 800 P

200

25

790

700

580

> 1X1011

11

< 1X10–7

6.5

2

12.8 – 19.1

Pufa vacuum turbine molecular pump represents safe performance

Modern turbo molecular pumps can achieve a circumferential velocity of over 400 meters per second. This will be converted into corresponding high rotor kinetic energy, which will be instantly transmitted to the casing and pump base when the rotor and stator come into contact. Therefore, the stability of the pump casing plays a crucial role and requires both theoretical and practical testing. The turbomolecular pump of Pufa Vacuum has passed UL 61010 and/or Semi S2 certification. In addition to mechanical safety performance, this certification also includes dual protection against fire and excessive speed, which was jointly initiated by Pfeiffer Vacuum and T ü V Rheinland.

We focus on the core interests of our customers

Throughout the entire production process, vacuum technology is often the key factor in success or failure. In various production applications, the cost losses caused by batch failures or production interruptions can even reach millions of yuan. Therefore, it is very important to use components with stable and reliable performance. Nowadays, the working time of turbo molecular pumps can reach 100000 hours. This means that the product can run continuously for up to 11 years. During this period, efforts should be made to avoid operational interruptions caused by maintenance or service as much as possible. The Pufa vacuum turbine molecular pump has an extended self diagnostic function, which can meet this requirement. By analyzing the relevant technical data of vacuum pumps, it has provided great support for maintenance work. Therefore, any maintenance can be predicted in advance, and users can independently arrange maintenance plans. In addition, the vacuum pump oil and bearings can be directly replaced on site, which greatly ensures normal production operation. The integrated controller of turbomolecular pump reduces the need for cumbersome and expensive wiring. First class driving technology minimizes energy consumption while also featuring diverse interfaces. The vacuum pump has an IP54 protection level design, which meets the requirements of industrial environment applications. The compact structural design can meet the installation requirements of smaller physical spaces. To minimize costs, Pufa Vacuum provides a variety of controllers for different types of pumps. Even the weight of the pump body is a key factor to consider: a turbo molecular pump with a pumping speed of 250 liters per second weighs only 6 kg. The application range of Pufa vacuum turbine molecular pump is broad, including not only analytical instruments, vacuum processes, and semiconductor technology, but also vacuum coating, research and development, and other various industrial application fields.

application area

Vacuum technology plays a decisive role in many fields of product manufacturing and process research. Turbomolecular pumps play a crucial role in manufacturing extremely pure process conditions.

● Analytical instruments (mass spectrometry, microscopes, etc.)

Semiconductor industry (electronic components, integrated circuits, solar cells, etc.)

Optical/glass industry (insulation protection, anti reflection, reflection, filter coating, etc.)

Vacuum coating technology * (surface protection, decorative soil layer, display technology, screen, etc.)

Vacuum metallurgy (vacuum welding, vacuum sintering, vacuum alloys, vacuum furnaces, etc.)

Leakage detection (vacuum system, locomotive fuel tank, airbag, vacuum packaging industry)

Research facilities (nuclear particle physics, nuclear fusion research, laser applications, etc.)

● Lighting industry (lighting production, etc.)

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